Cleanroom Standard Environment Specification (LS14-C***C)
The appearance of the cleanroom environment specification differs from the standard environment specification in the following parts:
| Symbol | Description |
|---|---|
| a | Upper bellows |
| b | Lower bellows |
| c | Exhaust port |
Cleanroom Standard Environment Specification (LS14-C***C)
| LS14-C602C | LS14-C603C | LS14-C702C | LS14-C703C | LS14-C802C | LS14-C803C | |
|---|---|---|---|---|---|---|
| a | 225 | 225 | 325 | 325 | 425 | 425 |
| b | 622 | 722 | 622 | 722 | 622 | 722 |
| c | 170 | 270 | 170 | 270 | 170 | 270 |
| d | 53 | 153 | 53 | 153 | 53 | 153 |
| e | 588 | 588 | 606 | 606 | 615 | 615 |
| f | 615 | 615 | 651 | 651 | 682 | 682 |