Cleanroom Environment Specification

1. Unpack the Manipulator outside of the cleanroom.

2. Secure the Manipulator to transporting equipment (or a pallet) with bolts so that the Manipulator does not fall down.

3. Wipe off any dust on the Manipulator using a lint-free cloth that was dipped in ethyl alcohol or distilled water.

4. Carry the Manipulator into the cleanroom.

5. Referring to the standard specification’s installation procedure, install the Manipulator.

6. Connect an exhaust tube to the exhaust port.